This system enables to control pressure of the process chamber automatically.
Quality control and cost control realize this multipurpose model APC.
OEM supply to meet the customers’ requirements is available such as supplying the Developing APC for increasingly complex process.
Controller/Valve Integrated Model RS Series
Controller/Valve Discrete Model
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● AVR Series Valve
Size & Shape of this valve is in common with the above
■ APC Select Table (Japanese)